Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI

التفاصيل البيبلوغرافية
العنوان:	Light-Assisted Investigation of the Role of Oxygen Flow during IGZO Deposition on Deep Subgap States and their Evolution Under PBTI
المؤلفون:	Rinaudo, Pietro, Chasin, Adrian, Zhao, Ying, Kaczer, Ben, Rassoul, Nouredine, Dekkers, Harold F.W., van Setten, Michiel J., Belmonte, Attilio, De Wolf, Ingrid, Kar, Gouri, Franco, Jacopo
المصدر:	2024 IEEE International Reliability Physics Symposium (IRPS) International Reliability Physics Symposium (IRPS), 2024 IEEE. :1-6 Apr, 2024
Relation:	2024 IEEE International Reliability Physics Symposium (IRPS)
قاعدة البيانات:	IEEE Xplore Digital Library