مؤتمر
A Method for Predicting the Film Thickness of IC Deposited Films Based on FCBF-CATBOOST
| العنوان: | A Method for Predicting the Film Thickness of IC Deposited Films Based on FCBF-CATBOOST |
|---|---|
| المؤلفون: | Cai, Yu, Shi, Yumeng, Wang, Shiqi, Chen, Yining |
| المصدر: | 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) Science and Technology for Integrated Circuits (CSTIC), 2024 Conference of. :1-3 Mar, 2024 |
| Relation: | 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9798350362190 |
|---|---|
| DOI: | 10.1109/CSTIC61820.2024.10531926 |