مؤتمر
High Performance Wafer Defect Classification Model Based on Feature Fusion and RGB SEM Images
| العنوان: | High Performance Wafer Defect Classification Model Based on Feature Fusion and RGB SEM Images |
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| المؤلفون: | Shi, Zhongyu, Mei, Zhouzhouzhou, Zeng, Lichao, Chen, Yining |
| المصدر: | 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) Science and Technology for Integrated Circuits (CSTIC), 2024 Conference of. :1-3 Mar, 2024 |
| Relation: | 2024 Conference of Science and Technology for Integrated Circuits (CSTIC) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9798350362190 |
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| DOI: | 10.1109/CSTIC61820.2024.10532077 |