Effect of Passivation on BEOL-Compatible Oxide Semiconductor Transistor

التفاصيل البيبلوغرافية
العنوان: Effect of Passivation on BEOL-Compatible Oxide Semiconductor Transistor
المؤلفون: Kuo, Chi-Yuan, Lo, Tsung-Tien, Chiu, Yun-Ping, Lin, Wei-Chen, Liao, Hsien-Yi, Tsai, Chi-Hang, Lu, Sheng-Chia, Chen, Hsin-Chu, Huang, Haw-Tyng, Yeh, Po-Chun, Wu, Yuh-Renn, Wu, Chih-I
المصدر: 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA) Technology, Systems and Applications (VLSI TSA), 2024 International VLSI Symposium on. :1-2 Apr, 2024
Relation: 2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350360349
DOI:10.1109/VLSITSA60681.2024.10546465