دورية أكاديمية
A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters
العنوان: | A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters |
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المؤلفون: | Tang, Z., Esteves, G., Yen, S., Young, T.R., David Henry, M., Gastian, L., Nordquist, C., Olsson, R.H. |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 33(4):456-467 Aug, 2024 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
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DOI: | 10.1109/JMEMS.2024.3404420 |