مؤتمر
An Anti-Plasma Etching Film of Y2O3 Film
| العنوان: | An Anti-Plasma Etching Film of Y2O3 Film |
|---|---|
| المؤلفون: | Wei, Chia-Chih, Chen, Hsuan-Jung, Lee, Yi-Mu, Chang, Shao-Fu, Chen, Chien-Chon |
| المصدر: | 2024 10th International Conference on Applied System Innovation (ICASI) Applied System Innovation (ICASI), 2024 10th International Conference on. :87-89 Apr, 2024 |
| Relation: | 2024 10th International Conference on Applied System Innovation (ICASI) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 9798350394924 |
|---|---|
| تدمد: | 27684156 |
| DOI: | 10.1109/ICASI60819.2024.10547891 |