مؤتمر
An Anti-Plasma Etching Film of Y2O3 Film
العنوان: | An Anti-Plasma Etching Film of Y2O3 Film |
---|---|
المؤلفون: | Wei, Chia-Chih, Chen, Hsuan-Jung, Lee, Yi-Mu, Chang, Shao-Fu, Chen, Chien-Chon |
المصدر: | 2024 10th International Conference on Applied System Innovation (ICASI) Applied System Innovation (ICASI), 2024 10th International Conference on. :87-89 Apr, 2024 |
Relation: | 2024 10th International Conference on Applied System Innovation (ICASI) |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 9798350394924 |
---|---|
تدمد: | 27684156 |
DOI: | 10.1109/ICASI60819.2024.10547891 |