Design and DRIE Process of Silicon-Based Terahertz RF Receiver Front-End Instrumentation

التفاصيل البيبلوغرافية
العنوان: Design and DRIE Process of Silicon-Based Terahertz RF Receiver Front-End Instrumentation
المؤلفون: Li, Surui, Peng, Shuang, Yang, Fei
المصدر: 2024 IEEE International Conference on Computational Electromagnetics (ICCEM) Computational Electromagnetics (ICCEM), 2024 IEEE International Conference on. :1-3 Apr, 2024
Relation: 2024 IEEE International Conference on Computational Electromagnetics (ICCEM)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350383317
تدمد:27682552
DOI:10.1109/ICCEM60619.2024.10558932