A Study on the Surface Activation of Plasma Treatment for Hybrid Bonding Joint Interface

التفاصيل البيبلوغرافية
العنوان:	A Study on the Surface Activation of Plasma Treatment for Hybrid Bonding Joint Interface
المؤلفون:	Hsu, Chih-Jing, Fang, Hsu-Nan, Su, Tzu-Yu, Jiang, Zhao-Ze, Chen, Yi-Hua, Chen, Chien-Ching, Hsu, Che-Ming, Tsai, Yu-Pin, Chiang, Yuan-Feng, Kao, Jen-Chieh, Yeh, Yung-I
المصدر:	2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :1826-1829 May, 2024
Relation:	2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
قاعدة البيانات:	IEEE Xplore Digital Library