Novel Inorganic IR Release Process for High Temperature W2W and D2W Integration

التفاصيل البيبلوغرافية
العنوان: Novel Inorganic IR Release Process for High Temperature W2W and D2W Integration
المؤلفون: Urban, Peter, Povazay, Boris, Uhrmann, Thomas, Gruber, Michael Josef, Thallner, Bernd, Wimplinger, Markus
المصدر: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC) ECTC Electronic Components and Technology Conference (ECTC), 2024 IEEE 74th. :415-419 May, 2024
Relation: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350375985
تدمد:23775726
DOI:10.1109/ECTC51529.2024.00073