التفاصيل البيبلوغرافية
| العنوان: |
Delving into Conversion Effects in 0.5 µm Thin Film Aluminum Nitride MEMS Devices |
| المؤلفون: |
Trigona, Carlo, Almani, Suhail Ahmed, Mehdi, Alireza, Salerno, Giuliano A., Strano, Vincenzina, Bartasyte, Ausrine, Margueron, Samuel, Baglio, Salvatore, Micard, Quentin |
| المصدر: |
2024 IEEE International Symposium on Robotic and Sensors Environments (ROSE) Robotic and Sensors Environments (ROSE), 2024 IEEE International Symposium on. :1-5 Jun, 2024 |
| Relation: |
2024 IEEE International Symposium on Robotic and Sensors Environments (ROSE) |
| قاعدة البيانات: |
IEEE Xplore Digital Library |
