Enabling Monolithic Integration of an Advanced 7-Layer Silicon Back-End-of-Line (BEOL) on 40nm GaN for Next Generation MMICs

التفاصيل البيبلوغرافية
العنوان: Enabling Monolithic Integration of an Advanced 7-Layer Silicon Back-End-of-Line (BEOL) on 40nm GaN for Next Generation MMICs
المؤلفون: Roderick, Jonathan, Siddiqi, George, Denninghoff, Dan, Berkoh, Daniel, Tai, Joe, Rao, Sunil, Lynch, Jonathan, Clayton, T., Sharifi, Hasan, Kuzmenko, Daniel, Georgieva, Jana, McArthur, Warren, Mirshafieyan, Seyed, Howard, Dave
المصدر: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024 Microwave Symposium - IMS 2024, 2024 IEEE/MTT-S International. :318-321 Jun, 2024
Relation: 2024 IEEE/MTT-S International Microwave Symposium - IMS 2024
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350375046
تدمد:25767216
DOI:10.1109/IMS40175.2024.10600287