Investigating Fused Silica Bending Strength and Damping Characteristics on Resonators Fabricated Through Femtosecond Laser-Assisted Wet Etching: An Experimental Analysis

التفاصيل البيبلوغرافية
العنوان: Investigating Fused Silica Bending Strength and Damping Characteristics on Resonators Fabricated Through Femtosecond Laser-Assisted Wet Etching: An Experimental Analysis
المؤلفون: Amez-Droz, Loic, de Lara, Mateo Tunon, Amorosi, Anthony, Lambert, Pierre, Caucheteur, Christophe, Collette, Christophe
المصدر: 2024 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) Manipulation, Automation and Robotics at Small Scales (MARSS), 2024 International Conference on. :1-5 Jul, 2024
Relation: 2024 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350376807
9798350376791
DOI:10.1109/MARSS61851.2024.10612729