Application of a CFD Simulation on Spin Coating Process

التفاصيل البيبلوغرافية
العنوان: Application of a CFD Simulation on Spin Coating Process
المؤلفون: Wang, Xinchang, Wang, Yun, Liu, Yansong, Wei, Yayi, Ye, Tianchun
المصدر: 2024 2nd International Symposium of Electronics Design Automation (ISEDA) Electronics Design Automation (ISEDA), 2024 2nd International Symposium of. :540-546 May, 2024
Relation: 2024 2nd International Symposium of Electronics Design Automation (ISEDA)
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:9798350352030
9798350352023
DOI:10.1109/ISEDA62518.2024.10617586