مؤتمر
Simulation of MEMS Microfabrication Process Based on Narrow Band Level Set and Ray Tracing Methods
| العنوان: | Simulation of MEMS Microfabrication Process Based on Narrow Band Level Set and Ray Tracing Methods |
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| المؤلفون: | Zheng, Bin-Bin, Zhou, Zai-Fa, Liu, Ji-Yang, Bao, Su-Xin, Huang, Qing-An |
| المصدر: | 2024 2nd International Symposium of Electronics Design Automation (ISEDA) Electronics Design Automation (ISEDA), 2024 2nd International Symposium of. :84-88 May, 2024 |
| Relation: | 2024 2nd International Symposium of Electronics Design Automation (ISEDA) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
| ردمك: | 9798350352030 9798350352023 |
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| DOI: | 10.1109/ISEDA62518.2024.10617885 |