مؤتمر
Chemical beveling of Si/SiGe structures for structure and material analysis by Raman spectroscopy
| العنوان: | Chemical beveling of Si/SiGe structures for structure and material analysis by Raman spectroscopy |
|---|---|
| المؤلفون: | Srnanck, R., Kinder, R., Donoval, D., Peternai, L., Novotny, I., Geurts, J., McPhail, D.S., Chater, R., Nemcsics, A. |
| المصدر: | The Fourth International Conference on Advanced Semiconductor Devices and Microsystem Advanced semiconductor devices and microsystems Advanced Semiconductor Devices and Microsystems, 2002. The Fourth International Conference on. :195-198 2002 |
| Relation: | Proceedings of ASDAM'02 (4th International Conference on Advanced Semiconductor Devices and Microsystems) |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078037276X 9780780372764 |
|---|---|
| DOI: | 10.1109/ASDAM.2002.1088505 |