دورية أكاديمية
Laser Processing in Silicon Microelectronics Technology
العنوان: | Laser Processing in Silicon Microelectronics Technology |
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المؤلفون: | Leamy, H. |
المصدر: | IEEE Transactions on Components, Hybrids, and Manufacturing Technology IEEE Trans. Comp., Hybrids, Manufact. Technol. Components, Hybrids, and Manufacturing Technology, IEEE Transactions on. 5(1):112-117 Mar, 1982 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 01486411 15583082 |
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DOI: | 10.1109/TCHMT.1982.1135928 |