Nickel silicide metal gate FDSOI devices with improved gate oxide leakage

التفاصيل البيبلوغرافية
العنوان: Nickel silicide metal gate FDSOI devices with improved gate oxide leakage
المؤلفون: Krivokapic, Z., Maszara, W., Achutan, K., King, P., Gray, J., Sidorow, M., Zhao, E., Zhang, J., Chan, J., Marathe, A., Lin, M.-R.
المصدر: Digest. International Electron Devices Meeting, Electron devices meeting Electron Devices Meeting, 2002. IEDM '02. International. :271-274 2002
Relation: IEEE International Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780374622
9780780374621
DOI:10.1109/IEDM.2002.1175830