دورية أكاديمية
A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems
العنوان: | A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems |
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المؤلفون: | Roberts, D.C., Hanqing Li, Steyn, J.L., Yaglioglu, O., Spearing, S.M., Schmidt, M.A., Hagood, N.W. |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 12(1):81-92 Feb, 2003 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
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DOI: | 10.1109/JMEMS.2002.807471 |