Yield enhancement challenges for 90 nm and beyond

التفاصيل البيبلوغرافية
العنوان: Yield enhancement challenges for 90 nm and beyond
المؤلفون: Goel, H., Dance, D.
المصدر: Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI Advanced semiconductor manufacturing Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI. :262-265 2003
Relation: IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780376730
9780780376731
0780376811
9780780376816
تدمد:10788743
DOI:10.1109/ASMC.2003.1194504