مؤتمر
Leakage, breakdown, and TDDB characteristics of porous low-k silica-based interconnect dielectrics
| العنوان: | Leakage, breakdown, and TDDB characteristics of porous low-k silica-based interconnect dielectrics |
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| المؤلفون: | Ogawa, E.T., Jinyoung Kim, Haase, G.S., Mogul, H.C., McPherson, J.W. |
| المصدر: | 2003 IEEE International Reliability Physics Symposium Proceedings, 2003. 41st Annual. Reliability physics symposium Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International. :166-172 2003 |
| Relation: | International Reliability Physics Symposium |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780376498 9780780376496 |
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| DOI: | 10.1109/RELPHY.2003.1197739 |