مؤتمر
Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (II): effect of manufacturing uncertainties in the reliability of MEMS
| العنوان: | Application of adaptive multilevel substructuring technique to model CMOS micromachined thermistor gas sensor, part (II): effect of manufacturing uncertainties in the reliability of MEMS |
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| المؤلفون: | Sadek, K., Moussa, W. |
| المصدر: | Proceedings International Conference on MEMS, NANO and Smart Systems MEMS, NANO and smart systems MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on. :390-395 2003 |
| Relation: | Proceedings International Conference on MEMS, NANO and Smart Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0769519474 9780769519470 |
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| DOI: | 10.1109/ICMENS.2003.1222029 |