High resolution metal lift-off characterization

التفاصيل البيبلوغرافية
العنوان: High resolution metal lift-off characterization
المؤلفون: Sutton, A.K., Steen, S.
المصدر: Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) University/government/industry microelectronics symposium University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial. :94-98 2003
Relation: 15th Biennial University/Government/Industry Microelectronics Symposium
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780379721
9780780379725
تدمد:07496877
DOI:10.1109/UGIM.2003.1225704