Optimization of contact interface resistance for CMOS circuits

التفاصيل البيبلوغرافية
العنوان: Optimization of contact interface resistance for CMOS circuits
المؤلفون: Zhiping Zhou, Brown, D.K., Woods, E.V., Sutton, A.K., Patel, B.C., George, L.O.
المصدر: Proceedings of the 15th Biennial University/Government/ Industry Microelectronics Symposium (Cat. No.03CH37488) University/government/industry microelectronics symposium University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial. :174-178 2003
Relation: 15th Biennial University/Government/Industry Microelectronics Symposium
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780379721
9780780379725
تدمد:07496877
DOI:10.1109/UGIM.2003.1225721