مؤتمر
Electrical stability of the organic-inorganic material with low-k dielectric constant deposited by ICPCVD method
| العنوان: | Electrical stability of the organic-inorganic material with low-k dielectric constant deposited by ICPCVD method |
|---|---|
| المؤلفون: | Oh, K.S., Choi, C.K. |
| المصدر: | The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. Plasma science Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on. :409 2003 |
| Relation: | 30th International Conference on Plasma Science |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078037911X 9780780379114 |
|---|---|
| تدمد: | 07309244 |
| DOI: | 10.1109/PLASMA.2003.1229959 |