مؤتمر
Optimization of deep wet etching borosilicate glass substrates technological process for biomedical applications
| العنوان: | Optimization of deep wet etching borosilicate glass substrates technological process for biomedical applications |
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| المؤلفون: | Manea, E., Cernica, I., Lupu, M., Podaru, C. |
| المصدر: | 2003 International Semiconductor Conference. CAS 2003 Proceedings (IEEE Cat. No.03TH8676) Semiconductor conference. CAS 2003 Semiconductor Conference, 2003. CAS 2003. International. 1:201-204 Vol. 1 2003 |
| Relation: | 2003 International Semiconductor Conference. CAS 2003 Proceedings |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780378210 9780780378216 |
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| DOI: | 10.1109/SMICND.2003.1251377 |