Gate isolation technology for compact poly-CMP embedded flash memories

التفاصيل البيبلوغرافية
العنوان: Gate isolation technology for compact poly-CMP embedded flash memories
المؤلفون: Slotboom, M., Goarin, P., Akil, N., van Duuren, M., Demand, M., Wouters, J.M.D., Beckx, S., Leray, P., Baertsb, C., Baerts, C., Heylen, N., Pollentier, I.
المصدر: ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003. Solid-state device research - ESSDERC '03 European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on. :159-162 2003
Relation: ESSDERC 2003. Proceedings of the 33rd European Solid-State Device Research - ESSDERC '03
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780379993
9780780379992
DOI:10.1109/ESSDERC.2003.1256835