مؤتمر
Gate isolation technology for compact poly-CMP embedded flash memories
العنوان: | Gate isolation technology for compact poly-CMP embedded flash memories |
---|---|
المؤلفون: | Slotboom, M., Goarin, P., Akil, N., van Duuren, M., Demand, M., Wouters, J.M.D., Beckx, S., Leray, P., Baertsb, C., Baerts, C., Heylen, N., Pollentier, I. |
المصدر: | ESSDERC '03. 33rd Conference on European Solid-State Device Research, 2003. Solid-state device research - ESSDERC '03 European Solid-State Device Research, 2003. ESSDERC '03. 33rd Conference on. :159-162 2003 |
Relation: | ESSDERC 2003. Proceedings of the 33rd European Solid-State Device Research - ESSDERC '03 |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 0780379993 9780780379992 |
---|---|
DOI: | 10.1109/ESSDERC.2003.1256835 |