مؤتمر
Evaluation of the boron activation and depth distribution using BBr2+ implants
| العنوان: | Evaluation of the boron activation and depth distribution using BBr2+ implants |
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| المؤلفون: | Winston, S.H., Gwilliam, R.M., Sealy, B.J., Boudreault, G., Jeynes, C., Webb, R.P., Kirkby, K.J. |
| المصدر: | Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :115-118 2002 |
| Relation: | Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780371550 9780780371552 |
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| DOI: | 10.1109/IIT.2002.1257952 |