مؤتمر
SIMOX wafer fabrication by 100mA O+ implantation using the UI-6000 implanter
| العنوان: | SIMOX wafer fabrication by 100mA O+ implantation using the UI-6000 implanter |
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| المؤلفون: | Tokiguchi, K., Seki, H., Seki, T., Itou, J., Higuchi, Y., Mera, K., Tanaka, S., Yamashita, Y., Hashimoto, I., Yoshikawa, A. |
| المصدر: | Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on Ion implantation technology proceedings Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on. :629-632 2002 |
| Relation: | Proceedings of the 2002 14th International Conference on Ion Implantation Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780371550 9780780371552 |
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| DOI: | 10.1109/IIT.2002.1258084 |