مؤتمر
Compatibility of dual metal gate electrodes with high-k dielectrics for CMOS
| العنوان: | Compatibility of dual metal gate electrodes with high-k dielectrics for CMOS |
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| المؤلفون: | JaeHoon Lee, You-Seok Suh, Lazar, H., Jha, R., Gurganus, J., Yanxia Lin, Misra, V. |
| المصدر: | IEEE International Electron Devices Meeting 2003 Electron devices IEDM'03 Electron Devices Meeting, 2003. IEDM '03 Technical Digest. IEEE International. :13.5.1-13.5.4 2003 |
| Relation: | IEEE International Electron Devices Meeting 2003 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780378725 9780780378728 |
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| DOI: | 10.1109/IEDM.2003.1269290 |