مؤتمر
Surface polishing of three dimensional micro structures
| العنوان: | Surface polishing of three dimensional micro structures |
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| المؤلفون: | Lim, C.H., Kim, W.B., Lee, S.H., Lee, J.I., Kim, Y.J., Lee, S.J. |
| المصدر: | 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest Micro electro mechanical systems Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS). :709-712 2004 |
| Relation: | 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 078038265X 9780780382657 |
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| DOI: | 10.1109/MEMS.2004.1290683 |