مؤتمر
The effects of RTA processes on flow pattern defects in Czochralski silicon
| العنوان: | The effects of RTA processes on flow pattern defects in Czochralski silicon |
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| المؤلفون: | Hanfeng Zhang, Caichi Liu, Qigang Zhou, Jing Wang, Qiuyan Hao, Hongdi Zhang, Yangxian Li |
| المصدر: | The Fourth International Workshop on Junction Technology, 2004. IWJT '04. Juction technology Junction Technology, 2004. IWJT '04. The Fourth International Workshop on. :58-61 2004 |
| Relation: | Extended Abstracts of the Fourth International Workshop on Junction Technology |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780381912 9780780381919 |
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| DOI: | 10.1109/IWJT.2004.1306758 |