دورية أكاديمية
Plasma-sheath expansion during plasma immersion ion implantation of insulating materials
| العنوان: | Plasma-sheath expansion during plasma immersion ion implantation of insulating materials |
|---|---|
| المؤلفون: | Xiubo Tian, Ricky King-Yu Fu, Chu, P.K., Shiqin Yang |
| المصدر: | IEEE Transactions on Plasma Science IEEE Trans. Plasma Sci. Plasma Science, IEEE Transactions on. 32(2):792-798 Apr, 2004 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00933813 19399375 |
|---|---|
| DOI: | 10.1109/TPS.2004.826058 |