دورية أكاديمية
Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes
| العنوان: | Electrostatic actuation of three-dimensional MEMS mirrors using sidewall electrodes |
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| المؤلفون: | Chuan Pu, Sangtae Park, Chu, P.B., Shi-Sheng Lee, Ming Tsai, Peale, D., Bonadeo, N.H., Brener, I. |
| المصدر: | IEEE Journal of Selected Topics in Quantum Electronics IEEE J. Select. Topics Quantum Electron. Selected Topics in Quantum Electronics, IEEE Journal of. 10(3):472-477 Jun, 2004 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 1077260X 15584542 |
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| DOI: | 10.1109/JSTQE.2004.828480 |