مؤتمر
Characteristics of PAALD-TaN thin films derived from TAIMATA precursor for copper metallization
| العنوان: | Characteristics of PAALD-TaN thin films derived from TAIMATA precursor for copper metallization |
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| المؤلفون: | Jong Won Hong, Kyung In Choi, You Kyoung Lee, Sung Gun Park, Sang Woo Lee, Jong Myeong Lee, Sang Bom Kang, Gil Heyun Choi, Sung Tae Kim, U-In Chung, Joo Tae Moon |
| المصدر: | Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) Interconnect technology Interconnect Technology Conference, 2004. Proceedings of the IEEE 2004 International. :9-11 2004 |
| Relation: | Proceedings of the IEEE 2004 International Interconnect Technology Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780383087 9780780383081 |
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| DOI: | 10.1109/IITC.2004.1345665 |