Triple junctions for reduced impact of offset spacer variation on CMOS device parameters

التفاصيل البيبلوغرافية
العنوان: Triple junctions for reduced impact of offset spacer variation on CMOS device parameters
المؤلفون: Jurczak, M., Rooyackers, R., De Keersgieter, A., Kunnen, E., Henson, K., Richard, O., Dachs, C.
المصدر: Proceedings of the 30th European Solid-State Circuits Conference (IEEE Cat. No.04EX850) Solid-state device research conference Solid-State Device Research Conference, 2004. ESSDERC 2004. Proceeding of the 34th European. :145-148 2004
Relation: Proceedings of the 34th European Solid-State Device Research Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780384784
9780780384781
DOI:10.1109/ESSDER.2004.1356510