مؤتمر
Fabrication of high quality patterned SOI materials by optimized low-dose SIMOX
| العنوان: | Fabrication of high quality patterned SOI materials by optimized low-dose SIMOX |
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| المؤلفون: | Yemin Dong, Meng Chen, Jing Chen, Xi Wang |
| المصدر: | 2004 IEEE International SOI Conference (IEEE Cat. No.04CH37573) SOI conference SOI Conference, 2004. Proceedings. 2004 IEEE International. :60-61 2004 |
| Relation: | 2004 IEEE International SOI Conference |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780384970 9780780384972 |
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| DOI: | 10.1109/SOI.2004.1391555 |