Low leakage reliability characterization methodology for advanced CMOS with gate oxide in the 1nm range

التفاصيل البيبلوغرافية
العنوان: Low leakage reliability characterization methodology for advanced CMOS with gate oxide in the 1nm range
المؤلفون: Chung, S.S., Feng, H.J., Hsich, Y.S., Liu, A., Lin, W.M., Chen, D.F., Ho, J.H., Huang, K.T., Yang, C.L., Cheng, O., Sheng, Y.C., Wu, D.Y., Shiau, W.T., Chien, S.C., Kuan Liao, Sun, S.W.
المصدر: IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004. Electron devices meeting Electron Devices Meeting, 2004. IEDM Technical Digest. IEEE International. :477-480 2004
Relation: 2004 International Electron Devices Meeting
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780386841
9780780386846
DOI:10.1109/IEDM.2004.1419193