مؤتمر
MEMS reliability: metrology set-up for investigation of fatigue causes
| العنوان: | MEMS reliability: metrology set-up for investigation of fatigue causes |
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| المؤلفون: | Millet, O., Blanrue, O., Legrand, B., Collard, D., Buchaillot, L. |
| المصدر: | 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005. Micro electro mechanical systems Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on. :483-486 2005 |
| Relation: | 18th IEEE International Conference on Micro Electro Mechanical Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780387325 9780780387324 |
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| تدمد: | 10846999 |
| DOI: | 10.1109/MEMSYS.2005.1453972 |