The impact of step and flash imprint lithography for nano-manufacturing applications

التفاصيل البيبلوغرافية
العنوان: The impact of step and flash imprint lithography for nano-manufacturing applications
المؤلفون: LeBrake, D., Watts, M., McMackin, I., Jin Choi, Schumaker, P., Va Nguyen, Frank Xu, Thompson, E., Babbs, D., Sreenivasan, S.V., Stacey, N.
المصدر: Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. Microprocesses and Nanotechnology Conference, 2004. Digest of Papers. 2004 International. :54-54 2004
Relation: Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004.
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:4990247205
9784990247201
DOI:10.1109/IMNC.2004.245718