دورية أكاديمية
High speed replication of submicron features on large areas by X-ray lithography
| العنوان: | High speed replication of submicron features on large areas by X-ray lithography |
|---|---|
| المؤلفون: | Maydan, D., Coquin, G.A., Maldonado, J.R., Somekh, S., Lou, D.Y., Taylor, G.N. |
| المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 22(7):429-433 Jul, 1975 |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | تدمد: | 00189383 15579646 |
|---|---|
| DOI: | 10.1109/T-ED.1975.18156 |