دورية أكاديمية

Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices

التفاصيل البيبلوغرافية
العنوان: Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices
المؤلفون: Tamama, T., Kuji, N.
المصدر: IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 33(2):192-197 Feb, 1986
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
تدمد:00189383
15579646
DOI:10.1109/T-ED.1986.22464