دورية أكاديمية
Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices
العنوان: | Auto-calibrated potential map drawing equipment and its application to characterization of plasma-coupled devices |
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المؤلفون: | Tamama, T., Kuji, N. |
المصدر: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 33(2):192-197 Feb, 1986 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 00189383 15579646 |
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DOI: | 10.1109/T-ED.1986.22464 |