مؤتمر
Tensile stress determination in silicon nitride membrane by AFM characterization
| العنوان: | Tensile stress determination in silicon nitride membrane by AFM characterization |
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| المؤلفون: | Rollier, A.-S., Legrand, B., Deresmes, D., Lagouge, M., Collard, D., Buchaillot, L. |
| المصدر: | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 1:828-831 Vol. 1 2005 |
| Relation: | TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0780389948 9780780389946 |
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| تدمد: | 2159547X 21641641 |
| DOI: | 10.1109/SENSOR.2005.1496545 |