Fabrication challenges for a complicated micro-flow channel system at low temperature process

التفاصيل البيبلوغرافية
العنوان: Fabrication challenges for a complicated micro-flow channel system at low temperature process
المؤلفون: Liu, C.W., Gau, C., Ko, H.S., Dai, B.T.
المصدر: The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Solid-State Sensors, Actuators and Microsystems Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on. 2:1477-1480 Vol. 2 2005
Relation: TRANSDUCERS '05. The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780389948
9780780389946
تدمد:2159547X
21641641
DOI:10.1109/SENSOR.2005.1497362