مؤتمر
A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen
العنوان: | A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen |
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المؤلفون: | Lander, R., Hooker, J., van Zijl, J., Roozeboom, F., Maas, M., de Tamminga, Y., Wolters, R. |
المصدر: | 32nd European Solid-State Device Research Conference Solid-State Device Research Conference, 2002. Proceeding of the 32nd European. :103-106 2002 |
Relation: | 32nd European Solid-State Device Research Conference |
قاعدة البيانات: | IEEE Xplore Digital Library |
ردمك: | 8890084782 9788890084782 |
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DOI: | 10.1109/ESSDERC.2002.194880 |