A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen

التفاصيل البيبلوغرافية
العنوان: A Tuneable Metal Gate Work Function Using Solid State Diffusion of Nitrogen
المؤلفون: Lander, R., Hooker, J., van Zijl, J., Roozeboom, F., Maas, M., de Tamminga, Y., Wolters, R.
المصدر: 32nd European Solid-State Device Research Conference Solid-State Device Research Conference, 2002. Proceeding of the 32nd European. :103-106 2002
Relation: 32nd European Solid-State Device Research Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:8890084782
9788890084782
DOI:10.1109/ESSDERC.2002.194880