Influence of Doping Profile and Halo Implantation on the Threshold Voltage Mismatch of a 0.13um CMOS Technology

التفاصيل البيبلوغرافية
العنوان: Influence of Doping Profile and Halo Implantation on the Threshold Voltage Mismatch of a 0.13um CMOS Technology
المؤلفون: Croon, J.A., Augendre, E., Decoutere, S., Sansen, W., Maes, H.E.
المصدر: 32nd European Solid-State Device Research Conference Solid-State Device Research Conference, 2002. Proceeding of the 32nd European. :579-582 2002
Relation: 32nd European Solid-State Device Research Conference
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:8890084782
9788890084782
DOI:10.1109/ESSDERC.2002.194997