مؤتمر
Assessment of the Effect of Micro-Fabrication Uncertainties on the Sensitivity of Gas Sensors Using 3-D Finite Element Modeling
| العنوان: | Assessment of the Effect of Micro-Fabrication Uncertainties on the Sensitivity of Gas Sensors Using 3-D Finite Element Modeling |
|---|---|
| المؤلفون: | Sadek, K., Moussa, W. |
| المصدر: | 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on. :663-665 2004 |
| Relation: | International Conference on MEMS, NANO and Smart Systems |
| قاعدة البيانات: | IEEE Xplore Digital Library |
Full Text Finder | ردمك: | 0769521894 9780769521893 |
|---|---|
| DOI: | 10.1109/ICMENS.2004.1509034 |