Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application

التفاصيل البيبلوغرافية
العنوان: Stress-Induced Bending of Micromachined Bilayer Cantilever and Its Optical Application
المؤلفون: Ju-Nan Kuo, Gwo-Bin Lee, Wen-Fung Pan
المصدر: 2004 IEEE International Conference on Robotics and Biomimetics Robotics and Biomimetics, 2004. ROBIO 2004. IEEE International Conference on. :290-295 2004
Relation: 2004 IEEE International Conference on Robotics and Biomimetics
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
DOI:10.1109/ROBIO.2004.1521792