دورية أكاديمية
A novel capacitive pressure sensor based on sandwich structures
العنوان: | A novel capacitive pressure sensor based on sandwich structures |
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المؤلفون: | Min-Xin Zhou, Qing-An Huang, Ming Qin, Wei Zhou |
المصدر: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 14(6):1272-1282 Dec, 2005 |
قاعدة البيانات: | IEEE Xplore Digital Library |
تدمد: | 10577157 19410158 |
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DOI: | 10.1109/JMEMS.2005.859100 |