A Computational Study on the Growth and Composition of InGaAsP Film in a Horizontal MOCVD Reactor

التفاصيل البيبلوغرافية
العنوان: A Computational Study on the Growth and Composition of InGaAsP Film in a Horizontal MOCVD Reactor
المؤلفون: Dong-Seok Kim, Ik-Tae Im, Woo-Seung Kim
المصدر: Conference on Optoelectronic and Microelectronic Materials and Devices, 2004. Optoelectronic and Microelectronic Materials and Devices, 2004 Conference on. :101-104 2004
Relation: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices
قاعدة البيانات: IEEE Xplore Digital Library
الوصف
ردمك:0780388208
9780780388208
DOI:10.1109/COMMAD.2004.1577502